Growth temperature and growth rate dependency on reactor pressure for InN epilayers grown by HPCVD

1 Department of Physics and Astronomy, Georgia State University, 29 Peachtree Center Ave, Atlanta, GA 30303, USA 2 Institut für Festkörperphysik, Technische Universität Berlin, Berlin, Germany 3 School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA 30332, USA 4 Dept. Electrical & Computer Engineering, University of North Carolina Charlotte, Charlotte, NC 28223, USA 5 Dept. Materials Science and Engineering, North Carolina State University, Raleigh NC 27695, USA